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National Repository of Grey Literature 3 records found  Search took 0.00 seconds. 
SMV-2023-63: Measuring interferometric systems
 Mikel, Břetislav
The contract research was focused on the development of multi-axis measuring systems using the most accurate method of measurement based on the principle of laser radiation interference. The basic reference is a laser source with a wavelength of 633 nm. Measuring systems are intended for devices requiring measurement accuracy in the order of nanometers.
Detailed record
SMV-2023-61: Measuring systems for lithographers
 Mikel, Břetislav
The contract research was focused on the development of multi-axis measuring systems using the most accurate method of measurement based on the principle of laser radiation interference. The basic reference is a laser source with a wavelength of 633 nm. Measuring systems are intended for devices requiring measurement accuracy in the order of nanometers.
Detailed record
SMV-2022-37: Interferometers for coordinate measurement
 Holá, Miroslava ; Hrabina, Jan ; Oulehla, Jindřich ; Pokorný, Pavel ; Lazar, Josef ; Šarlejová, Tatiana ; Šlechtický, Stanislav ; Humeňanská, Jana
The contract research was focused on the development of multi-axis measuring systems using the most accurate method of measurement based on the principle of laser radiation interference. The basic reference is a laser source with a wavelength of 633 nm. Measuring systems are intended for devices requiring measurement accuracy in the order of nanometers.
Detailed record

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